Semiconductor
🔧 UHV Gas Delivery Fittings & Manifolds
VCR male glands and female nuts, micro-gaskets, double-ferrule compression sleeves, multi-port gas mixing monoblocks, check valve plungers, laser-drilled micro-orifice disks, quick-disconnect couplers, Y-shaped splitter connectors
What is UHV Gas Delivery Fittings & Manifolds?
🔧 UHV Gas Delivery Fittings & Manifolds represents a complete system of precision titanium components engineered for Semiconductor applications. VCR male glands and female nuts, micro-gaskets, double-ferrule compression sleeves, multi-port gas mixing monoblocks, check valve plungers, laser-drilled micro-orifice disks, quick-disconnect couplers, Y-shaped splitter connectors The system integrates 10 distinct component types manufactured through 3 specialized processes.
Key manufacturing processes for this system include Cleanroom CNC Class 100 for gas delivery geometry, Electropolish Ra <0.25um with Class 6g gauge, UHP DI water cascade rinse with Class 6g gauge, Particle count MIL-STD-1246 with Class 6g gauge, Electropolish Ra <0.25um with 0.5mm corner radius, each selected and qualified to meet component-specific requirements.
Engineering & Design Principles
Material: Grade 2 (CP-Ti) ultra-pure vacuum melt for VCR glands and gaskets — zero trace metal outgassing. Grade 5 for female nut couplings and check valve plungers requiring high thread strength and cyclic fat
Form: Bar stock for VCR components and manifold blocks via CNC turning/boring. Laser drilling for micro-orifice disks. Hot forging + machining for Y-shaped splitters to maintain smooth internal transitions.
Standards & Material Specifications
Standards: ASTM B348 Grade 2 (UHP melt) / Grade 5, electropolished, 100% He leak tested + PMI certified, Class 100 packaged, center-vented per SEMI F1 for virtual leak elimination
Engineering Solution Blueprint
Brackets / Fittings / Connectors
Aerospace · Automotive · General Industry
1 Part Feature Analysis
L/T-shaped or irregular structural parts with mounting holes, weight reduction pockets, ribs
- ⚠️ Vibration fatigue
- ⚠️ Multi-axial stress
- ⚠️ Weight reduction
- ⚠️ Installation alignment precision
2 Material Selection Rationale
Grade 5 Ti-6Al-4V — General alpha-beta alloy, high strength
Grade 5 (Ti-6Al-4V) offers excellent mechanical properties and weight reduction (4.43g/cm3). Standard for aerospace brackets.
3 Form Selection Rationale
Plate / Sheet — for welding, machined housings
CNC milled from plate is common for brackets. Flexible for small batches. Die forging for high volume.
4 Manufacturing Process & Services
Core Processes:
Toll Processing Services:
Process Pitfalls:
- ⚠️ Thin walls (<2mm) cause chatter; use high speed, light depth strategy
- ⚠️ Hole position tolerance +-0.05mm requires single-setup machining
5 Procurement Specifications
AMS 4928 TC4 annealed plate, 100% dimensional inspection, anodized
Manufacturing Process Flow
CNC turning of titanium on multi-axis lathes produces cylindrical components with precision diameters and surface finishes. Live tooling enables milli
Professional manufacturing process for for General, Aerospace titanium components. Deep-hole boring of multi-port manifolds is performed by certified
Laser drilling of titanium uses pulsed laser energy to create precise holes through percussion or trepanning methods. Hole diameters range from 0.05 m
Components in This System
| Component | Material |
|---|---|
| Titanium Double Ferrule Front Sleeve | Grade 2 CP-Ti (UHP Melt) |
| Titanium Double Ferrule Back Ring | Grade 2 CP-Ti (UHP Melt) |
| Titanium Gas Check Valve Plunger | Grade 2 CP-Ti (UHP Melt) |
| Titanium Gas Quick-Disconnect Coupler | Grade 2 CP-Ti (UHP Melt) |
| Titanium Gas Y-Splitter Connector | Grade 2 CP-Ti (UHP Melt) |
| Titanium Micro-Orifice Restrictor | Grade 2 CP-Ti (UHP Melt) |
Frequently Asked Questions
What titanium grades are used in UHV Gas Delivery Fittings & Manifolds systems?
What manufacturing processes are used for UHV Gas Delivery Fittings & Manifolds?
What quality standards apply to UHV Gas Delivery Fittings & Manifolds components?
What industries use UHV Gas Delivery Fittings & Manifolds?
Can you provide DFM feedback for UHV Gas Delivery Fittings & Manifolds designs?
Engineering Trends
- ▸ Process: CNC turning of VCR male/female components
- ▸ Process: Deep-hole boring of multi-port manifolds
- ▸ Process: Laser micro-drilling of orifice disks
Related Manufacturing Capabilities
These specialized processes support UHV Gas Delivery Fittings & Manifolds component manufacturing.
One Metal. One Focus. Infinite Precision.
Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze CNC Ti is the dedicated titanium manufacturing center of Baoji Boze Metal Products Co., Ltd.