Semiconductor
🔧 UHV Gas Delivery Fittings & Manifolds
VCR male glands and female nuts, micro-gaskets, double-ferrule compression sleeves, multi-port gas mixing monoblocks, check valve plungers, laser-drilled micro-orifice disks, quick-disconnect couplers, Y-shaped splitter connectors
What is UHV Gas Delivery Fittings & Manifolds?
🔧 UHV Gas Delivery Fittings & Manifolds represents a complete system of precision titanium components engineered for Semiconductor applications. VCR male glands and female nuts, micro-gaskets, double-ferrule compression sleeves, multi-port gas mixing monoblocks, check valve plungers, laser-drilled micro-orifice disks, quick-disconnect couplers, Y-shaped splitter connectors The system integrates 10 distinct component types manufactured through 3 specialized processes.
Key manufacturing processes for this system include Cleanroom CNC Class 100 for gas delivery geometry, Electropolish Ra <0.25um with 0.5mm corner radius, UHP DI water cascade rinse with 0.5mm corner radius, Particle count MIL-STD-1246 with 0.5mm corner radius, Electropolish Ra <0.25um with Class 6g gauge, each selected and qualified to meet component-specific requirements.
Engineering & Design Principles
Material: Grade 2 (CP-Ti) ultra-pure vacuum melt for VCR glands and gaskets — zero trace metal outgassing. Grade 5 for female nut couplings and check valve plungers requiring high thread strength and cyclic fat
Form: Bar stock for VCR components and manifold blocks via CNC turning/boring. Laser drilling for micro-orifice disks. Hot forging + machining for Y-shaped splitters to maintain smooth internal transitions.
Standards & Material Specifications
Standards: ASTM B348 Grade 2 (UHP melt) / Grade 5, electropolished, 100% He leak tested + PMI certified, Class 100 packaged, center-vented per SEMI F1 for virtual leak elimination
Engineering Solution Blueprint
Brackets / Fittings / Connectors
Aerospace · Automotive · General Industry
1 Part Feature Analysis
L/T-shaped or irregular structural parts with mounting holes, weight reduction pockets, ribs
- ⚠️ Vibration fatigue
- ⚠️ Multi-axial stress
- ⚠️ Weight reduction
- ⚠️ Installation alignment precision
2 Material Selection Rationale
Grade 5 Ti-6Al-4V — General alpha-beta alloy, high strength
Grade 5 (Ti-6Al-4V) offers excellent mechanical properties and weight reduction (4.43g/cm3). Standard for aerospace brackets.
3 Form Selection Rationale
Plate / Sheet — for welding, machined housings
CNC milled from plate is common for brackets. Flexible for small batches. Die forging for high volume.
4 Manufacturing Process & Services
Core Processes:
Toll Processing Services:
Process Pitfalls:
- ⚠️ Thin walls (<2mm) cause chatter; use high speed, light depth strategy
- ⚠️ Hole position tolerance +-0.05mm requires single-setup machining
5 Procurement Specifications
AMS 4928 TC4 annealed plate, 100% dimensional inspection, anodized
Manufacturing Process Flow
CNC turning of titanium on multi-axis lathes produces cylindrical components with precision diameters and surface finishes. Live tooling enables milli
Professional manufacturing process for for General, Aerospace titanium components. Deep-hole boring of multi-port manifolds is performed by certified
Laser drilling of titanium uses pulsed laser energy to create precise holes through percussion or trepanning methods. Hole diameters range from 0.05 m
Components in This System
| Component | Material |
|---|---|
| Titanium Double Ferrule Back Ring | Grade 2 CP-Ti (UHP Melt) |
| Titanium Double Ferrule Front Sleeve | Grade 2 CP-Ti (UHP Melt) |
| Titanium Gas Check Valve Plunger | Grade 2 CP-Ti (UHP Melt) |
| Titanium Gas Quick-Disconnect Coupler | Grade 2 CP-Ti (UHP Melt) |
| Titanium Gas Y-Splitter Connector | Grade 2 CP-Ti (UHP Melt) |
| Titanium Micro-Orifice Restrictor | Grade 2 CP-Ti (UHP Melt) |
| Titanium Multi-Port Gas Manifold | Grade 2 CP-Ti (UHP Melt) |
| Titanium VCR Female Nut | Grade 2 CP-Ti (UHP Melt) |
| Titanium VCR Male Gland | Grade 2 CP-Ti (UHP Melt) |
| Titanium VCR Micro-Gasket | Grade 2 CP-Ti (UHP Melt) |
Frequently Asked Questions
What titanium grades are used in UHV Gas Delivery Fittings & Manifolds systems?
What manufacturing processes are used for UHV Gas Delivery Fittings & Manifolds?
What quality standards apply to UHV Gas Delivery Fittings & Manifolds components?
What industries use UHV Gas Delivery Fittings & Manifolds?
Can you provide DFM feedback for UHV Gas Delivery Fittings & Manifolds designs?
Engineering Trends
- ▸ Process: CNC turning of VCR male/female components
- ▸ Process: Deep-hole boring of multi-port manifolds
- ▸ Process: Laser micro-drilling of orifice disks
Related Manufacturing Capabilities
These specialized processes support UHV Gas Delivery Fittings & Manifolds component manufacturing.
One Metal. One Focus. Infinite Precision.
Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze Titanium Manufacturing Center is operated by Baoji Boze Metal Products Co., Ltd.
Certifications verified by NADCAP and compliant with ASTM International titanium standards (B265, B348, B381, F136, F2924) and ISO 13485 medical-device QMS.