Titanium Multi-Port Gas Manifold is an ultra-clean monoblock multiport gas component designed for Monoblock multi-port gas mixing manifold. Manufactured from Grade 2 CP-Ti with Class 100 cleanroom protocols, it provides the non-magnetic, low-outgassing, and particle-free performance essential for wafer fabrication environments.
Titanium Multi-Port Gas Manifold
| Technical Parameter | Specification |
|---|---|
| Component SKU | TI-SEM-GAS-PORTGA |
| Standards & Specifications | ASTM B348 |
| Surface Finish | Passivation ASTM F86 (20-30% HNO3, 30min @50C) |
Titanium Multi-Port Gas Manifold
Monoblock multi-port gas mixing manifold
| Technical Parameter | Specification Value |
|---|---|
| International Compliance | ASTM B348 |
| Surface Finish & Max Temp | Passivation ASTM F86 (20-30% HNO3, 30min @50C) |
| NDT & Quality Control | Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360 |
- • 100% Traceability: Mill Test Certificate (EN 10204 3.1) with heat analysis & mechanical testing.
- • NDT Verification: Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360.
- • Compliance: REACH, RoHS 3 certified. FAI AS9102 available.
- • Process: CNC precision machining , vacuum stress relief , thread rolling , surface passivation .
- • Thermal Stress Relief: Post-machining vacuum annealing (540-675°C under Argon) reduces distortion risk >70%.
- • Rolled Threads: Thread rolling (not cutting) increases fatigue limits by 30-50%.
Q: What outgassing properties does Titanium Multi-Port Gas Manifold have in vacuum environments? ▼
Grade 2 CP-Ti exhibits outgassing rates below 1×10⁻¹² Torr·L/s·cm² after bake-out at 200°C for 4 hours, compliant with SEMI F3 and ASTM E595 requirements. Total mass loss (TML) <0.1% and collected volatile condensable materials (CVCM) <0.01% per ASTM E595. This makes Titanium Multi-Port Gas Manifold suitable for monoblock multiport gas in UHV processing chambers down to 1×10⁻¹⁰ Torr.
Q: What is the typical lead time for Titanium Multi-Port Gas Manifold orders? ▼
Standard lead time for Titanium Multi-Port Gas Manifold is 15-25 business days depending on quantity and complexity. Rush orders (3-5 working days) are available for prototype evaluation. Sample evaluation (1-5 units) can be expedited to 5-7 business days. Volume pricing is available for production quantities above 100 units.
Q: What material certifications are provided with Titanium Multi-Port Gas Manifold? ▼
Each Titanium Multi-Port Gas Manifold shipment includes EN 10204 Type 3.1 mill test certificate with chemical analysis, mechanical properties, and heat identification. Dimensional inspection reports and Certificate of Conformance (CoC) are standard. First Article Inspection Reports (FAIR) per AS9102 are available on request for monoblock multiport gas.
§ Grade 2 CP-Ti Selection for monoblock multiport gas
Function
Engineered as a Gas Delivery component, this part serves the specific function of . Grade 2 CP-Ti (UHP Melt) was selected for its proven performance in Semiconductor service conditions.
Specifications
- SKU: TI-SEM-GAS-PORTGA
- Category: Gas Delivery
- Industry: Semiconductor
- Material: Grade 2 CP-Ti (UHP Melt)
- Process: CNC precision machining , vacuum stress relief , thread rolling , surface passivation
- Weight: 35-45% lighter than steel equivalents at equivalent section modulus
§ UHV Particle & Surface Contamination Verification
Quality Management
Quality system compliant with ISO 9001:2015. Each Titanium Multi-Port Gas Manifold batch includes full material traceability, dimensional inspection results, and a Certificate of Conformity (CoC).
Inspection & NDT
Vision-based optical inspection for surface defects; helium leak testing for sealed interfaces; eddy current surface crack detection on high-stress areas
§ Cleanroom Manufacturing & Finishing Process
Titanium Multi-Port Gas Manifold is manufactured using CNC precision machining , vacuum stress relief , thread rolling , surface passivation . Each operation is performed by certified machinists with real-time process monitoring and dimensional verification at critical stages. Heat code traceability is maintained throughout all production steps.
Commercial Logistics & Procurement Framework
Pricing and lead times for Titanium Multi-Port Gas Manifold are batch-dependent. Contact our supply chain team for volume-based tiered pricing.
Regulatory & Quality Assurance Ledger
Verifiable certifications for Titanium Multi-Port Gas Manifold
Material Test Certificate (MTC)
EN 10204 3.1
Environmental Compliance
REACH (EC No 1907/2006)
Restricted Substances
RoHS 3 Directive (2015/863/EU)
Quality Management System
ISO 9001:2015
Dimensional Tolerances
ISO 2768-m
Standard: ASTM B348
Systems Interconnectivity & Topology
Cross-functional integration matrix for Tier-1 supply chains and assembly orchestration.
- ▸ Primary Assembly Integration
- ▸ Subsystem Mounting Interface
Titanium Multi-Port Gas Manifold
Material: Grade 2 CP-Ti (UHP Melt)
SKU: TI-SEM-GAS-PORTGA
Industry: Semiconductor / System: UHV Gas Delivery Fittings & Manifolds
- ▸ Fastener Kit A
- ▸ Sealing Gasket
- ▸ Protective Cover
Custom Titanium Part
Ready to manufacture Titanium Multi-Port Gas Manifold (SKU: TI-SEM-GAS-PORTGA)? Contact our engineering team for a custom solution.
Custom Titanium PartRelated Knowledge
One Metal. One Focus. Infinite Precision.
Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze Titanium Manufacturing Center is operated by Baoji Boze Metal Products Co., Ltd.
Certifications verified by NADCAP and compliant with ASTM International titanium standards (B265, B348, B381, F136, F2924) and ISO 13485 medical-device QMS.