Titanium Micro-Orifice Restrictor is an ultra-clean laserdrilled microaperture gas component designed for Laser-drilled micro-aperture gas restrictor disc. Manufactured from Grade 2 CP-Ti with Class 100 cleanroom protocols, it provides the non-magnetic, low-outgassing, and particle-free performance essential for wafer fabrication environments.
Titanium Micro-Orifice Restrictor
| Technical Parameter | Specification |
|---|---|
| Component SKU | TI-SEM-GAS-MICROO |
| Standards & Specifications | ASTM B348 |
| Surface Finish | Passivation ASTM F86 (20-30% HNO3, 30min @50C) |
Titanium Micro-Orifice Restrictor
Laser-drilled micro-aperture gas restrictor disc
| Technical Parameter | Specification Value |
|---|---|
| International Compliance | ASTM B348 |
| Surface Finish & Max Temp | Passivation ASTM F86 (20-30% HNO3, 30min @50C) |
| NDT & Quality Control | Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360 |
- • 100% Traceability: Mill Test Certificate (EN 10204 3.1) with heat analysis & mechanical testing.
- • NDT Verification: Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360.
- • Compliance: REACH, RoHS 3 certified. FAI AS9102 available.
- • Process: CNC precision machining, vacuum stress relief, thread rolling, surface passivation.
- • Thermal Stress Relief: Post-machining vacuum annealing (540-675°C under Argon) reduces distortion risk >70%.
- • Rolled Threads: Thread rolling (not cutting) increases fatigue limits by 30-50%.
Q: What outgassing properties does Titanium Micro-Orifice Restrictor have in vacuum environments? ▼
Grade 2 CP-Ti exhibits outgassing rates below 1×10⁻¹² Torr·L/s·cm² after bake-out at 200°C for 4 hours, compliant with SEMI F3 and ASTM E595 requirements. Total mass loss (TML) <0.1% and collected volatile condensable materials (CVCM) <0.01% per ASTM E595. This makes Titanium Micro-Orifice Restrictor suitable for laserdrilled microaperture gas in UHV processing chambers down to 1×10⁻¹⁰ Torr.
Q: What is the typical lead time for Titanium Micro-Orifice Restrictor orders? ▼
Standard lead time for Titanium Micro-Orifice Restrictor is 15-25 business days depending on quantity and complexity. Rush orders (3-5 working days) are available for prototype evaluation. Sample evaluation (1-5 units) can be expedited to 5-7 business days. Volume pricing is available for production quantities above 100 units.
Q: What material certifications are provided with Titanium Micro-Orifice Restrictor? ▼
Each Titanium Micro-Orifice Restrictor shipment includes EN 10204 Type 3.1 mill test certificate with chemical analysis, mechanical properties, and heat identification. Dimensional inspection reports and Certificate of Conformance (CoC) are standard. First Article Inspection Reports (FAIR) per AS9102 are available on request for laserdrilled microaperture gas.
§ Grade 2 CP-Ti Selection for laserdrilled microaperture gas
Function
Engineered as a Gas Delivery component, this part serves the specific function of . Grade 2 CP-Ti (UHP Melt) was selected for its proven performance in Semiconductor service conditions.
Specifications
- SKU: TI-SEM-GAS-MICROO
- Category: Gas Delivery
- Industry: Semiconductor
- Material: Grade 2 CP-Ti (UHP Melt)
- Process: CNC precision machining, vacuum stress relief, thread rolling, surface passivation
- Weight: 35-45% lighter than steel equivalents at equivalent section modulus
§ UHV Particle & Surface Contamination Verification
Quality Management
Manufactured under ISO 9001:2015 with full EN 10204 Type 3.1 material traceability from ingot to finished Titanium Micro-Orifice Restrictor. All critical features are CMM-verified and documented in the First Article Inspection Report.
Inspection & NDT
100% CMM dimensional inspection per ISO 10360 on critical features; surface roughness verification per ISO 4287; material grade verification via PMI
§ Cleanroom Manufacturing & Finishing Process
Titanium Micro-Orifice Restrictor is manufactured using cnc precision machining, vacuum stress relief, thread rolling, surface passivation. Each operation is performed by certified machinists with real-time process monitoring and dimensional verification at critical stages. Heat code traceability is maintained throughout all production steps.
Commercial Logistics & Procurement Framework
Pricing and lead times for Titanium Micro-Orifice Restrictor are batch-dependent. Contact our supply chain team for volume-based tiered pricing.
Regulatory & Quality Assurance Ledger
Verifiable certifications for Titanium Micro-Orifice Restrictor
Material Test Certificate (MTC)
EN 10204 3.1
Environmental Compliance
REACH (EC No 1907/2006)
Restricted Substances
RoHS 3 Directive (2015/863/EU)
Quality Management System
ISO 9001:2015
Dimensional Tolerances
ISO 2768-m
Standard: ASTM B348
Systems Interconnectivity & Topology
Cross-functional integration matrix for Tier-1 supply chains and assembly orchestration.
- ▸ Primary Assembly Integration
- ▸ Subsystem Mounting Interface
Titanium Micro-Orifice Restrictor
Material: Grade 2 CP-Ti (UHP Melt)
SKU: TI-SEM-GAS-MICROO
Industry: Semiconductor / System: UHV Gas Delivery Fittings & Manifolds
- ▸ Fastener Kit A
- ▸ Sealing Gasket
- ▸ Protective Cover
Request Enterprise Pricing
Fill out the form below and our team will respond within 24 hours with a tailored quotation for Titanium Micro-Orifice Restrictor (SKU: TI-SEM-GAS-MICROO).
Need titanium micro-orifice restrictor for your semiconductor process tool? Send your specifications — our cleanroom manufacturing team responds within 24 hours.
Request UHV Manufacturing Quote for Titanium Micro-Orifice RestrictorOne Metal. One Focus. Infinite Precision.
Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze CNC Ti is the dedicated titanium manufacturing center of Baoji Boze Metal Products Co., Ltd.