Titanium Wafer Handling End-Effector is an ultra-clean robot endeffector vacuum component designed for Robot end-effector vacuum pad for wafer handling. Manufactured from Grade 5 Ti-6Al-4V with Class 100 cleanroom protocols, it provides the non-magnetic, low-outgassing, and particle-free performance essential for wafer fabrication environments.
Titanium Wafer Handling End-Effector
| Technical Parameter | Specification |
|---|---|
| Component SKU | TI-SEM-WAF-HANDLI |
| Standards & Specifications | ISO 2768-mASTM B348MIL-STD-810H |
| Surface Finish | Tumble finished Ra 0.8um + passivation |
Titanium Wafer Handling End-Effector
Robot end-effector vacuum pad for wafer handling
| Technical Parameter | Specification Value |
|---|---|
| International Compliance | ISO 2768-m, ASTM B348, MIL-STD-810H |
| Surface Finish & Max Temp | Tumble finished Ra 0.8um + passivation |
| NDT & Quality Control | Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360 |
- • 100% Traceability: Mill Test Certificate (EN 10204 3.1) with heat analysis & mechanical testing.
- • NDT Verification: Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360.
- • Compliance: REACH, RoHS 3 certified. FAI AS9102 available.
- • Process: CNC swiss turning, diamond-cut beveling, PVD coating, optical gauging.
- • Thermal Stress Relief: Post-machining vacuum annealing (540-675°C under Argon) reduces distortion risk >70%.
- • Rolled Threads: Thread rolling (not cutting) increases fatigue limits by 30-50%.
Q: What is the magnetic permeability of Titanium Wafer Handling End-Effector? ▼
Grade 5 Ti-6Al-4V has a magnetic permeability µ < 1.0001 (effectively non-magnetic), essential for robot endeffector vacuum in electron beam lithography, ion implantation, and SEM/EDX tool chambers where magnetic materials would deflect charged particle beams. Permeability is verified per ASTM A342 for each production batch.
Q: What is the typical lead time for Titanium Wafer Handling End-Effector orders? ▼
Standard lead time for Titanium Wafer Handling End-Effector is 15-25 business days depending on quantity and complexity. Rush orders (3-5 working days) are available for prototype evaluation. Sample evaluation (1-5 units) can be expedited to 5-7 business days. Volume pricing is available for production quantities above 100 units.
Q: What material certifications are provided with Titanium Wafer Handling End-Effector? ▼
Each Titanium Wafer Handling End-Effector shipment includes EN 10204 Type 3.1 mill test certificate with chemical analysis, mechanical properties, and heat identification. Dimensional inspection reports and Certificate of Conformance (CoC) are standard. First Article Inspection Reports (FAIR) per AS9102 are available on request for robot endeffector vacuum.
§ Grade 5 Ti-6Al-4V Selection for robot endeffector vacuum
Function
A precision Wafer Handling component designed for . The selection of Grade 5 Ti-6Al-4V provides the optimal balance of strength-to-weight and environmental resistance required for this Semiconductor application.
Specifications
- SKU: TI-SEM-WAF-HANDLI
- Category: Wafer Handling
- Industry: Semiconductor
- Material: Grade 5 Ti-6Al-4V
- Process: CNC swiss turning, diamond-cut beveling, PVD coating, optical gauging
- Weight: Typical 45% weight reduction over AISI 4140 steel at equivalent yield strength
§ UHV Particle & Surface Contamination Verification
Quality Management
Production executed in AS9100D-certified facility. Material certificates, dimensional reports, and surface finish certifications accompany every shipment of Titanium Wafer Handling End-Effector components.
Inspection & NDT
Full dimensional layout per AS9102 FAIR requirements; ultrasonic immersion scanning for volumetric integrity; micro-hardness traverse on heat-affected zones
§ Cleanroom Manufacturing & Finishing Process
Titanium Wafer Handling End-Effector is manufactured using cnc swiss turning, diamond-cut beveling, pvd coating, optical gauging. Each operation is performed by certified machinists with real-time process monitoring and dimensional verification at critical stages. Heat code traceability is maintained throughout all production steps.
Commercial Logistics & Procurement Framework
Pricing and lead times for Titanium Wafer Handling End-Effector are batch-dependent. Contact our supply chain team for volume-based tiered pricing.
Regulatory & Quality Assurance Ledger
Verifiable certifications for Titanium Wafer Handling End-Effector
Material Test Certificate (MTC)
EN 10204 3.1
Environmental Compliance
REACH (EC No 1907/2006)
Restricted Substances
RoHS 3 Directive (2015/863/EU)
Quality Management System
AS9100D
Standard: ISO 2768-m
ISO 2768-m
Standard: ASTM B348
Standard: MIL-STD-810H
MIL-STD-810H
Systems Interconnectivity & Topology
Cross-functional integration matrix for Tier-1 supply chains and assembly orchestration.
- ▸ Main Housing Assembly
- ▸ Secondary Structure Carrier
Titanium Wafer Handling End-Effector
Material: Grade 5 Ti-6Al-4V
SKU: TI-SEM-WAF-HANDLI
Industry: Semiconductor / System: Semiconductor Process Chamber Components
- ▸ Spacer Washer Kit
- ▸ Thread Locker Application
- ▸ Calibration Certificate
定制钛组件
Ready to manufacture Titanium Wafer Handling End-Effector (SKU: TI-SEM-WAF-HANDLI)? Contact our engineering team for a custom solution.
定制钛组件Related Knowledge
One Metal. One Focus. Infinite Precision.
Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze Titanium Manufacturing Center is operated by Baoji Boze Metal Products Co., Ltd.