Titanium Slit-Valve Oval Bezel is an ultra-clean oval slitvalve sealing component designed for Oval slit-valve sealing bezel for wafer transfer. Manufactured from Grade 5 Ti-6Al-4V with Class 100 cleanroom protocols, it provides the non-magnetic, low-outgassing, and particle-free performance essential for wafer fabrication environments.
Titanium Slit-Valve Oval Bezel
| Technical Parameter | Specification |
|---|---|
| Component SKU | TI-SEM-CHA-VALVEO |
| Standards & Specifications | MIL-STD-810HASTM B117 |
| Surface Finish | PVD TiAlN coating (2-3um, HV2500) |
Titanium Slit-Valve Oval Bezel
Oval slit-valve sealing bezel for wafer transfer
| Technical Parameter | Specification Value |
|---|---|
| International Compliance | MIL-STD-810H, ASTM B117 |
| Surface Finish & Max Temp | PVD TiAlN coating (2-3um, HV2500) |
| NDT & Quality Control | Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360 |
- • 100% Traceability: Mill Test Certificate (EN 10204 3.1) with heat analysis & mechanical testing.
- • NDT Verification: Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360.
- • Compliance: REACH, RoHS 3 certified. FAI AS9102 available.
- • Process: 5-axis CNC contouring , electropolishing , ultrasonic clean , vision inspection .
- • Thermal Stress Relief: Post-machining vacuum annealing (540-675°C under Argon) reduces distortion risk >70%.
- • Rolled Threads: Thread rolling (not cutting) increases fatigue limits by 30-50%.
Q: What metallic contamination levels are guaranteed for Titanium Slit-Valve Oval Bezel? ▼
Titanium Slit-Valve Oval Bezel is manufactured to ensure metallic surface contamination below 1×10¹⁰ atoms/cm² for Fe, Cr, Ni, Cu, and Zn per SEMI F108. For oval slitvalve sealing in front-end processes, additional ICP-MS verification is available with detection limits to 1×10⁸ atoms/cm². Double VAR-melted starting stock ensures inclusion-free microstructure.
Q: What is the typical lead time for Titanium Slit-Valve Oval Bezel orders? ▼
Standard lead time for Titanium Slit-Valve Oval Bezel is 15-25 business days depending on quantity and complexity. Rush orders (3-5 working days) are available for prototype evaluation. Sample evaluation (1-5 units) can be expedited to 5-7 business days. Volume pricing is available for production quantities above 100 units.
Q: What material certifications are provided with Titanium Slit-Valve Oval Bezel? ▼
Each Titanium Slit-Valve Oval Bezel shipment includes EN 10204 Type 3.1 mill test certificate with chemical analysis, mechanical properties, and heat identification. Dimensional inspection reports and Certificate of Conformance (CoC) are standard. First Article Inspection Reports (FAIR) per AS9102 are available on request for oval slitvalve sealing.
§ Grade 5 Ti-6Al-4V Selection for oval slitvalve sealing
Function
Designed for Semiconductor applications, this component fulfills the role of . The use of Grade 5 Ti-6Al-4V ensures long-term reliability in this Chamber Hardware configuration.
Specifications
- SKU: TI-SEM-CHA-VALVEO
- Category: Chamber Hardware
- Industry: Semiconductor
- Material: Grade 5 Ti-6Al-4V
- Process: 5-axis CNC contouring , electropolishing , ultrasonic clean , vision inspection
- Weight: Weight optimized through topology analysis - 30% lighter than baseline
§ UHV Particle & Surface Contamination Verification
Quality Management
Manufactured to aerospace-grade quality standards with 100% material traceability. FAIR documentation available per AS9102 for Titanium Slit-Valve Oval Bezel production lots.
Inspection & NDT
Coordinate measuring machine (CMM) full geometry verification; dye penetrant inspection (DPI) per ASTM E1417; spectroscopic alloy verification per ASTM E1476
§ Cleanroom Manufacturing & Finishing Process
Titanium Slit-Valve Oval Bezel is manufactured using 5-axis CNC contouring , electropolishing , ultrasonic clean , vision inspection . Each operation is performed by certified machinists with real-time process monitoring and dimensional verification at critical stages. Heat code traceability is maintained throughout all production steps.
Commercial Logistics & Procurement Framework
Pricing and lead times for Titanium Slit-Valve Oval Bezel are batch-dependent. Contact our supply chain team for volume-based tiered pricing.
Regulatory & Quality Assurance Ledger
Verifiable certifications for Titanium Slit-Valve Oval Bezel
Material Test Certificate (MTC)
EN 10204 3.1
Environmental Compliance
REACH (EC No 1907/2006)
Restricted Substances
RoHS 3 Directive (2015/863/EU)
Dimensional Tolerances
ISO 2768-m
Standard: MIL-STD-810H
MIL-STD-810H
Standard: ASTM B117
ASTM B117
Systems Interconnectivity & Topology
Cross-functional integration matrix for Tier-1 supply chains and assembly orchestration.
- ▸ Platform Interface Plate
- ▸ System Integration Frame
Titanium Slit-Valve Oval Bezel
Material: Grade 5 Ti-6Al-4V
SKU: TI-SEM-CHA-VALVEO
Industry: Semiconductor / System: UHV Sealing Rings & Chamber Compression Hardware
- ▸ Retention Clip Assembly
- ▸ Compression Spring Set
- ▸ Installation Tool
Custom Titanium Part
Ready to manufacture Titanium Slit-Valve Oval Bezel (SKU: TI-SEM-CHA-VALVEO)? Contact our engineering team for a custom solution.
Custom Titanium PartRelated Knowledge
Material
Grade 5 Ti-6Al-4V
Capability
Electropolishing + Class 100 ultrasonic cleaning
Surface Treatment
Capability
Electropolishing of all vacuum-facing surfaces
Surface Treatment
Capability
Electropolishing of all wetted surfaces
Surface Treatment
System
UHV Sealing Rings & Chamber Compression Hardware
One Metal. One Focus. Infinite Precision.
Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze Titanium Manufacturing Center is operated by Baoji Boze Metal Products Co., Ltd.
Certifications verified by NADCAP and compliant with ASTM International titanium standards (B265, B348, B381, F136, F2924) and ISO 13485 medical-device QMS.