Titanium Segmented Clamping Ring is an ultra-clean segmented circular flange component designed for Segmented circular flange clamping ring. Manufactured from Grade 5 Ti-6Al-4V with Class 100 cleanroom protocols, it provides the non-magnetic, low-outgassing, and particle-free performance essential for wafer fabrication environments.
Titanium Segmented Clamping Ring
| Technical Parameter | Specification |
|---|---|
| Component SKU | TI-SEM-CHA-SEGMEN |
| Standards & Specifications | ISO 2768-mMIL-STD-810H |
| Surface Finish | Electropolishing Ra <0.4um + passivation |
Titanium Segmented Clamping Ring
Segmented circular flange clamping ring
| Technical Parameter | Specification Value |
|---|---|
| International Compliance | ISO 2768-m, MIL-STD-810H |
| Surface Finish & Max Temp | Electropolishing Ra <0.4um + passivation |
| NDT & Quality Control | Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360 |
- • 100% Traceability: Mill Test Certificate (EN 10204 3.1) with heat analysis & mechanical testing.
- • NDT Verification: Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360.
- • Compliance: REACH, RoHS 3 certified. FAI AS9102 available.
- • Process: CNC milling, secondary deburring, bead blast finish, final CMM inspection.
- • Thermal Stress Relief: Post-machining vacuum annealing (540-675°C under Argon) reduces distortion risk >70%.
- • Rolled Threads: Thread rolling (not cutting) increases fatigue limits by 30-50%.
Q: What particle generation specifications apply to Titanium Segmented Clamping Ring? ▼
Titanium Segmented Clamping Ring is manufactured and cleaned to Class 100 cleanroom standards per ISO 14644-1. Surface particle count is verified to <0.1 particles/cm² at ≥0.3 µm size per SEMI M51. For segmented circular flange in wafer handling, electropolished surfaces (Ra <0.25 µm) minimize particle trapping. DI water rinse + N₂ blow-dry final cleaning is standard.
Q: What is the typical lead time for Titanium Segmented Clamping Ring orders? ▼
Standard lead time for Titanium Segmented Clamping Ring is 15-25 business days depending on quantity and complexity. Rush orders (3-5 working days) are available for prototype evaluation. Sample evaluation (1-5 units) can be expedited to 5-7 business days. Volume pricing is available for production quantities above 100 units.
Q: What material certifications are provided with Titanium Segmented Clamping Ring? ▼
Each Titanium Segmented Clamping Ring shipment includes EN 10204 Type 3.1 mill test certificate with chemical analysis, mechanical properties, and heat identification. Dimensional inspection reports and Certificate of Conformance (CoC) are standard. First Article Inspection Reports (FAIR) per AS9102 are available on request for segmented circular flange.
§ Grade 5 Ti-6Al-4V Selection for segmented circular flange
Function
A precision Chamber Seal component designed for . The selection of Grade 5 Ti-6Al-4V provides the optimal balance of strength-to-weight and environmental resistance required for this Semiconductor application.
Specifications
- SKU: TI-SEM-CHA-SEGMEN
- Category: Chamber Seal
- Industry: Semiconductor
- Material: Grade 5 Ti-6Al-4V
- Process: CNC milling, secondary deburring, bead blast finish, final CMM inspection
- Weight: Up to 55% weight savings compared to stainless steel alternatives
§ UHV Particle & Surface Contamination Verification
Quality Management
Manufactured under ISO 9001:2015 with full EN 10204 Type 3.1 material traceability from ingot to finished Titanium Segmented Clamping Ring. All critical features are CMM-verified and documented in the First Article Inspection Report.
Inspection & NDT
100% CMM dimensional inspection per ISO 10360 on critical features; surface roughness verification per ISO 4287; material grade verification via PMI
§ Cleanroom Manufacturing & Finishing Process
Titanium Segmented Clamping Ring is manufactured using cnc milling, secondary deburring, bead blast finish, final cmm inspection. Each operation is performed by certified machinists with real-time process monitoring and dimensional verification at critical stages. Heat code traceability is maintained throughout all production steps.
Commercial Logistics & Procurement Framework
Pricing and lead times for Titanium Segmented Clamping Ring are batch-dependent. Contact our supply chain team for volume-based tiered pricing.
Regulatory & Quality Assurance Ledger
Verifiable certifications for Titanium Segmented Clamping Ring
Material Test Certificate (MTC)
EN 10204 3.1
Environmental Compliance
REACH (EC No 1907/2006)
Restricted Substances
RoHS 3 Directive (2015/863/EU)
Quality Management System
AS9100D
Dimensional Tolerances
ISO 2768-m
Standard: MIL-STD-810H
MIL-STD-810H
Systems Interconnectivity & Topology
Cross-functional integration matrix for Tier-1 supply chains and assembly orchestration.
- ▸ Device Enclosure Subassembly
- ▸ Internal Frame Structure
Titanium Segmented Clamping Ring
Material: Grade 5 Ti-6Al-4V
SKU: TI-SEM-CHA-SEGMEN
Industry: Semiconductor / System: Semiconductor Vacuum Chamber Structural Hardware
- ▸ Assembly Hardware Pack
- ▸ Alignment Dowel Set
- ▸ Locking Mechanism
Request Enterprise Pricing
Fill out the form below and our team will respond within 24 hours with a tailored quotation for Titanium Segmented Clamping Ring (SKU: TI-SEM-CHA-SEGMEN).
Related Knowledge
Material
Grade 5 Ti-6Al-4V
Capability
Electropolishing + Class 100 ultrasonic cleaning
Surface Treatment
Capability
Electropolishing of all vacuum-facing surfaces
Surface Treatment
Capability
Electropolishing of all wetted surfaces
Surface Treatment
System
Semiconductor Vacuum Chamber Structural Hardware
Need titanium segmented clamping ring for your semiconductor process tool? Send your specifications — our cleanroom manufacturing team responds within 24 hours.
Request UHV Manufacturing Quote for Titanium Segmented Clamping RingOne Metal. One Focus. Infinite Precision.
Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze CNC Ti is the dedicated titanium manufacturing center of Baoji Boze Metal Products Co., Ltd.