Titanium Ion Implantation Electrode is an ultra-clean ion extraction electrode component designed for Ion extraction electrode disk for implanter. Manufactured from Grade 5 Ti-6Al-4V with Class 100 cleanroom protocols, it provides the non-magnetic, low-outgassing, and particle-free performance essential for wafer fabrication environments.
Titanium Ion Implantation Electrode
Titanium Ion Implantation Electrode
Ion extraction electrode disk for implanter
| Technical Parameter | Specification Value |
|---|---|
| International Compliance | ASTM B348, ISO 9001 |
| Surface Finish & Max Temp | Bead blasted matte Ra 1.6-3.2um + passivation |
| NDT & Quality Control | Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360 |
- • 100% Traceability: Mill Test Certificate (EN 10204 3.1) with heat analysis & mechanical testing.
- • NDT Verification: Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360.
- • Compliance: REACH, RoHS 3 certified. FAI AS9102 available.
- • Process: CNC turning, heat treatment, surface grinding, passivation, dimensional check.
- • Thermal Stress Relief: Post-machining vacuum annealing (540-675°C under Argon) reduces distortion risk >70%.
- • Rolled Threads: Thread rolling (not cutting) increases fatigue limits by 30-50%.
Q: Is Titanium Ion Implantation Electrode compatible with fluorine-based process chemistries? ▼
Grade 5 Ti-6Al-4V has excellent resistance to NF₃, CF₄, SF₆, and other fluorine-based plasma chemistries used in semiconductor etching and chamber cleaning. The TiO₂ passive layer forms a stable TiF₄ reaction product that does not spall or generate particles. However, Titanium Ion Implantation Electrode should not be used in HF-containing wet processes where corrosion rates exceed 0.5 mm/year.
Q: What is the typical lead time for Titanium Ion Implantation Electrode orders? ▼
Standard lead time for Titanium Ion Implantation Electrode is 15-25 business days depending on quantity and complexity. Rush orders (3-5 working days) are available for prototype evaluation. Sample evaluation (1-5 units) can be expedited to 5-7 business days. Volume pricing is available for production quantities above 100 units.
Q: What material certifications are provided with Titanium Ion Implantation Electrode? ▼
Each Titanium Ion Implantation Electrode shipment includes EN 10204 Type 3.1 mill test certificate with chemical analysis, mechanical properties, and heat identification. Dimensional inspection reports and Certificate of Conformance (CoC) are standard. First Article Inspection Reports (FAIR) per AS9102 are available on request for ion extraction electrode.
§ Grade 5 Ti-6Al-4V Selection for ion extraction electrode
Function
Engineered as a Ion Implant component, this part serves the specific function of . Grade 5 Ti-6Al-4V was selected for its proven performance in Semiconductor service conditions.
Specifications
- SKU: TI-SEM-ION-IONIMP
- Category: Ion Implant
- Industry: Semiconductor
- Material: Grade 5 Ti-6Al-4V
- Process: CNC turning, heat treatment, surface grinding, passivation, dimensional check
- Weight: 40% mass reduction vs standard steel components with same load rating
§ UHV Particle & Surface Contamination Verification
Quality Management
Quality system compliant with ISO 9001:2015. Each Titanium Ion Implantation Electrode batch includes full material traceability, dimensional inspection results, and a Certificate of Conformity (CoC).
Inspection & NDT
Vision-based optical inspection for surface defects; helium leak testing for sealed interfaces; eddy current surface crack detection on high-stress areas
§ Cleanroom Manufacturing & Finishing Process
Titanium Ion Implantation Electrode is manufactured using cnc turning, heat treatment, surface grinding, passivation, dimensional check. Each operation is performed by certified machinists with real-time process monitoring and dimensional verification at critical stages. Heat code traceability is maintained throughout all production steps.
Commercial Logistics & Procurement Framework
Pricing and lead times for Titanium Ion Implantation Electrode are batch-dependent. Contact our supply chain team for volume-based tiered pricing.
Regulatory & Quality Assurance Ledger
Verifiable certifications for Titanium Ion Implantation Electrode
Material Test Certificate (MTC)
EN 10204 3.1
Environmental Compliance
REACH (EC No 1907/2006)
Restricted Substances
RoHS 3 Directive (2015/863/EU)
Quality Management System
AS9100D
Standard: ASTM B348
Standard: ISO 9001
ISO 9001
Systems Interconnectivity & Topology
Cross-functional integration matrix for Tier-1 supply chains and assembly orchestration.
- ▸ Mechanical Subsystem A
- ▸ Structural Carrier Assembly
Titanium Ion Implantation Electrode
Material: Grade 5 Ti-6Al-4V
SKU: TI-SEM-ION-IONIMP
Industry: Semiconductor / System: Semiconductor Process Chamber Components
- ▸ Mounting Bracket Kit
- ▸ Threaded Insert Set
- ▸ Torque Specification Tag
Request Enterprise Pricing
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Related Knowledge
Need titanium ion implantation electrode for your semiconductor process tool? Send your specifications — our cleanroom manufacturing team responds within 24 hours.
Request UHV Manufacturing Quote for Titanium Ion Implantation ElectrodeOne Metal. One Focus. Infinite Precision.
Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze CNC Ti is the dedicated titanium manufacturing center of Baoji Boze Metal Products Co., Ltd.