Titanium Ceramic Heater Clamp Plate is an ultra-clean ceramic heater core component designed for Ceramic heater core clamping plate. Manufactured from Grade 2 CP-Ti with Class 100 cleanroom protocols, it provides the non-magnetic, low-outgassing, and particle-free performance essential for wafer fabrication environments.
Titanium Ceramic Heater Clamp Plate
| Technical Parameter | Specification |
|---|---|
| Component SKU | TI-SEM-CHA-HEATER |
| Standards & Specifications | ISO 2768-mASTM B348MIL-STD-810H |
| Surface Finish | Tumble finished Ra 0.8um + passivation |
Titanium Ceramic Heater Clamp Plate
Ceramic heater core clamping plate
| Technical Parameter | Specification Value |
|---|---|
| International Compliance | ISO 2768-m, ASTM B348, MIL-STD-810H |
| Surface Finish & Max Temp | Tumble finished Ra 0.8um + passivation |
| NDT & Quality Control | Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360 |
- • 100% Traceability: Mill Test Certificate (EN 10204 3.1) with heat analysis & mechanical testing.
- • NDT Verification: Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360.
- • Compliance: REACH, RoHS 3 certified. FAI AS9102 available.
- • Process: CNC swiss turning, diamond-cut beveling, PVD coating, optical gauging.
- • Thermal Stress Relief: Post-machining vacuum annealing (540-675°C under Argon) reduces distortion risk >70%.
- • Rolled Threads: Thread rolling (not cutting) increases fatigue limits by 30-50%.
Q: What is the magnetic permeability of Titanium Ceramic Heater Clamp Plate? ▼
Grade 2 CP-Ti has a magnetic permeability µ < 1.0001 (effectively non-magnetic), essential for ceramic heater core in electron beam lithography, ion implantation, and SEM/EDX tool chambers where magnetic materials would deflect charged particle beams. Permeability is verified per ASTM A342 for each production batch.
Q: What is the typical lead time for Titanium Ceramic Heater Clamp Plate orders? ▼
Standard lead time for Titanium Ceramic Heater Clamp Plate is 15-25 business days depending on quantity and complexity. Rush orders (3-5 working days) are available for prototype evaluation. Sample evaluation (1-5 units) can be expedited to 5-7 business days. Volume pricing is available for production quantities above 100 units.
Q: What material certifications are provided with Titanium Ceramic Heater Clamp Plate? ▼
Each Titanium Ceramic Heater Clamp Plate shipment includes EN 10204 Type 3.1 mill test certificate with chemical analysis, mechanical properties, and heat identification. Dimensional inspection reports and Certificate of Conformance (CoC) are standard. First Article Inspection Reports (FAIR) per AS9102 are available on request for ceramic heater core.
§ Grade 2 CP-Ti Selection for ceramic heater core
Function
Engineered as a Chamber Shield component, this part serves the specific function of . Grade 2 CP-Ti (Bead Blasted) was selected for its proven performance in Semiconductor service conditions.
Specifications
- SKU: TI-SEM-CHA-HEATER
- Category: Chamber Shield
- Industry: Semiconductor
- Material: Grade 2 CP-Ti (Bead Blasted)
- Process: CNC swiss turning, diamond-cut beveling, PVD coating, optical gauging
- Weight: Typical 45% weight reduction over AISI 4140 steel at equivalent yield strength
§ UHV Particle & Surface Contamination Verification
Quality Management
Production executed in AS9100D-certified facility. Material certificates, dimensional reports, and surface finish certifications accompany every shipment of Titanium Ceramic Heater Clamp Plate components.
Inspection & NDT
Full dimensional layout per AS9102 FAIR requirements; ultrasonic immersion scanning for volumetric integrity; micro-hardness traverse on heat-affected zones
§ Cleanroom Manufacturing & Finishing Process
Titanium Ceramic Heater Clamp Plate is manufactured using cnc swiss turning, diamond-cut beveling, pvd coating, optical gauging. Each operation is performed by certified machinists with real-time process monitoring and dimensional verification at critical stages. Heat code traceability is maintained throughout all production steps.
Commercial Logistics & Procurement Framework
Pricing and lead times for Titanium Ceramic Heater Clamp Plate are batch-dependent. Contact our supply chain team for volume-based tiered pricing.
Regulatory & Quality Assurance Ledger
Verifiable certifications for Titanium Ceramic Heater Clamp Plate
Material Test Certificate (MTC)
EN 10204 3.1
Environmental Compliance
REACH (EC No 1907/2006)
Restricted Substances
RoHS 3 Directive (2015/863/EU)
Quality Management System
AS9100D
Standard: ISO 2768-m
ISO 2768-m
Standard: ASTM B348
Standard: MIL-STD-810H
MIL-STD-810H
Systems Interconnectivity & Topology
Cross-functional integration matrix for Tier-1 supply chains and assembly orchestration.
- ▸ Main Housing Assembly
- ▸ Secondary Structure Carrier
Titanium Ceramic Heater Clamp Plate
Material: Grade 2 CP-Ti (Bead Blasted)
SKU: TI-SEM-CHA-HEATER
Industry: Semiconductor / System: Plasma Chamber Liners, Shields & Thermal Hardware
- ▸ Spacer Washer Kit
- ▸ Thread Locker Application
- ▸ Calibration Certificate
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Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze CNC Ti is the dedicated titanium manufacturing center of Baoji Boze Metal Products Co., Ltd.