Semiconductor

💻 MOCVD Wafer Susceptor & Support Hardware

Large-diameter disk/susceptor (up to 300mm) with pocket recesses for wafers, support arms with precision alignment features

1 Components 1 Materials 3 Processes 1 Standards

What is MOCVD Wafer Susceptor & Support Hardware?

💻 MOCVD Wafer Susceptor & Support Hardware represents a complete system of precision titanium components engineered for Semiconductor applications. Large-diameter disk/susceptor (up to 300mm) with pocket recesses for wafers, support arms with precision alignment features The system integrates 1 distinct component types manufactured through 3 specialized processes.

Key manufacturing processes for this system include Cleanroom CNC Class 100 for mocvd geometry, Electropolish Ra <0.25um for net-shape tolerance, UHP DI water cascade rinse for net-shape tolerance, Particle count MIL-STD-1246 for net-shape tolerance, each selected and qualified to meet component-specific requirements.

Engineering & Design Principles

Material: Grade 5 (Ti-6Al-4V) has a thermal expansion coefficient close to SiC-coated graphite, minimizing thermal stress. High strength at temperature and excellent corrosion resistance to process gases.

Form: Plate stock machined to final geometry. The support arm requires precision boring and threading for alignment adjustment.

Standards & Material Specifications

Standards: AMS 4928 Grade 5, annealed, 100% dimensional + surface finish inspection, Class 10 cleaned & packaged

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Engineering Solution Blueprint

Semiconductor Process Chamber Components

Semiconductor

1 Part Feature Analysis

Large diameter rings, liner shields, focus rings, clamp rings, gas distribution plates — thin-wall, high-purity

  • ⚠️ Plasma erosion
  • ⚠️ Particle generation
  • ⚠️ Metal contamination of wafers
  • ⚠️ Thermal uniformity
  • ⚠️ Cost of frequent replacement

2 Material Selection Rationale

Grade 2 CP-Ti — Industrial pure Ti, general corrosion resistance

Grade 2 (CP-Ti) is preferred for chamber components due to its low sputter yield and minimal particle generation in plasma environments. Grade 5 for structural rings.

3 Form Selection Rationale

Plate / Sheet — for welding, machined housings

Plate stock for large diameter rings and shields. Tube for gas distribution lines. Bar for fasteners.

4 Manufacturing Process & Services

Core Processes:

CNC turning/boring of ringsPrecision drilling of gas holesSurface treatment (anodizing)Ultra-sonic cleaning

Toll Processing Services:

Class 10 cleanroom packagingParticle count testingSurface roughness measurementHelium leak testing

Process Pitfalls:

  • ⚠️ Gas distribution hole diameter tolerance +-0.01mm required for uniform plasma
  • ⚠️ All surfaces must be electropolished to Ra<0.4um to minimize particle generation

5 Procurement Specifications

ASTM B265 Grade 2, double-melted (VAR), electropolished, Class 10 cleanroom packaged, particle count certified

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Manufacturing Process Flow

1
CNC milling / turning of susceptor and arms

CNC turning of titanium on multi-axis lathes produces cylindrical components with precision diameters and surface finishes. Live tooling enables milli

2
Precision boring of wafer pockets

Professional manufacturing process for for General, Aerospace titanium components. Precision boring of wafer pockets is performed by certified technic

3
Surface anodizing (optional)

Titanium anodizing (AMS 2488) grows a controlled oxide layer through electrochemical conversion in an electrolyte bath. Type II produces interference

Components in This System

Component Material
Titanium MOCVD Susceptor Support Arm Grade 5 Ti-6Al-4V

Frequently Asked Questions

What titanium grades are used in MOCVD Wafer Susceptor & Support Hardware systems?
MOCVD Wafer Susceptor & Support Hardware components are manufactured from Grade 5 Ti-6Al-4V. The specific grade is selected based on mechanical property requirements, corrosion resistance needs, and Semiconductor industry regulations.
What manufacturing processes are used for MOCVD Wafer Susceptor & Support Hardware?
The MOCVD Wafer Susceptor & Support Hardware system components are produced using Cleanroom CNC Class 100 for mocvd geometry, Electropolish Ra <0.25um for net-shape tolerance, UHP DI water cascade rinse for net-shape tolerance, Particle count MIL-STD-1246 for net-shape tolerance. Each process is selected and qualified to meet the specific dimensional, metallurgical, and surface requirements of each component within the system.
What quality standards apply to MOCVD Wafer Susceptor & Support Hardware components?
MOCVD Wafer Susceptor & Support Hardware components are manufactured to SEMI F20 (wafer susceptor applied) and other applicable specifications. Full material traceability, dimensional inspection reports, and certificates of conformance are provided with each shipment.
What industries use MOCVD Wafer Susceptor & Support Hardware?
MOCVD Wafer Susceptor & Support Hardware systems are deployed in Semiconductor applications. Each industry has specific regulatory and performance requirements that drive material selection and process qualification.
Can you provide DFM feedback for MOCVD Wafer Susceptor & Support Hardware designs?
Yes. Our engineering team provides free Design for Manufacturability (DFM) analysis for MOCVD Wafer Susceptor & Support Hardware projects. Upload your CAD file (STEP, DXF, or DWG format) and our team will review your design within 24 hours.

Engineering Trends

  • ▸ Process: CNC milling / turning of susceptor and arms
  • ▸ Process: Precision boring of wafer pockets
  • ▸ Process: Surface anodizing (optional)

Related Manufacturing Capabilities

These specialized processes support MOCVD Wafer Susceptor & Support Hardware component manufacturing.

CNC milling / turning of susceptor and arms Precision boring of wafer pockets Surface anodizing (optional)
About Boze Titanium Manufacturing Center

One Metal. One Focus. Infinite Precision.

Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.

Boze CNC Ti is the dedicated titanium manufacturing center of Baoji Boze Metal Products Co., Ltd.

AS9100D ISO 13485 ISO 9001 500+ Clients 15+ Years OEM/ODM
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