Titanium Vented Vacuum Screw is an ultra-clean centerbored vented screw component designed for Center-bored vented screw for UHV blind holes. Manufactured from Grade 5 Ti-6Al-4V with Class 100 cleanroom protocols, it provides the non-magnetic, low-outgassing, and particle-free performance essential for wafer fabrication environments.
Titanium Vented Vacuum Screw
| Technical Parameter | Specification |
|---|---|
| Component SKU | TI-SEM-CHA-VENTED |
| Standards & Specifications | MIL-STD-810HASTM B117 |
| Surface Finish | PVD TiAlN coating (2-3um, HV2500) |
Titanium Vented Vacuum Screw
Center-bored vented screw for UHV blind holes
| Technical Parameter | Specification Value |
|---|---|
| International Compliance | MIL-STD-810H, ASTM B117 |
| Surface Finish & Max Temp | PVD TiAlN coating (2-3um, HV2500) |
| NDT & Quality Control | Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360 |
- • 100% Traceability: Mill Test Certificate (EN 10204 3.1) with heat analysis & mechanical testing.
- • NDT Verification: Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360.
- • Compliance: REACH, RoHS 3 certified. FAI AS9102 available.
- • Process: 5-axis CNC contouring, electropolishing, ultrasonic clean, vision inspection.
- • Thermal Stress Relief: Post-machining vacuum annealing (540-675°C under Argon) reduces distortion risk >70%.
- • Rolled Threads: Thread rolling (not cutting) increases fatigue limits by 30-50%.
Q: What metallic contamination levels are guaranteed for Titanium Vented Vacuum Screw? ▼
Titanium Vented Vacuum Screw is manufactured to ensure metallic surface contamination below 1×10¹⁰ atoms/cm² for Fe, Cr, Ni, Cu, and Zn per SEMI F108. For centerbored vented screw in front-end processes, additional ICP-MS verification is available with detection limits to 1×10⁸ atoms/cm². Double VAR-melted starting stock ensures inclusion-free microstructure.
Q: What is the typical lead time for Titanium Vented Vacuum Screw orders? ▼
Standard lead time for Titanium Vented Vacuum Screw is 15-25 business days depending on quantity and complexity. Rush orders (3-5 working days) are available for prototype evaluation. Sample evaluation (1-5 units) can be expedited to 5-7 business days. Volume pricing is available for production quantities above 100 units.
Q: What material certifications are provided with Titanium Vented Vacuum Screw? ▼
Each Titanium Vented Vacuum Screw shipment includes EN 10204 Type 3.1 mill test certificate with chemical analysis, mechanical properties, and heat identification. Dimensional inspection reports and Certificate of Conformance (CoC) are standard. First Article Inspection Reports (FAIR) per AS9102 are available on request for centerbored vented screw.
§ Grade 5 Ti-6Al-4V Selection for centerbored vented screw
Function
A precision Chamber Hardware component designed for . The selection of Grade 5 Ti-6Al-4V provides the optimal balance of strength-to-weight and environmental resistance required for this Semiconductor application.
Specifications
- SKU: TI-SEM-CHA-VENTED
- Category: Chamber Hardware
- Industry: Semiconductor
- Material: Grade 5 Ti-6Al-4V
- Process: 5-axis CNC contouring, electropolishing, ultrasonic clean, vision inspection
- Weight: Weight optimized through topology analysis - 30% lighter than baseline
§ UHV Particle & Surface Contamination Verification
Quality Management
ISO 9001:2015 quality management system. Every Titanium Vented Vacuum Screw shipment includes EN 10204 3.1 MTR, CMM report, and surface finish certification.
Inspection & NDT
Automated optical inspection with sub-micron resolution; X-ray CT scanning for internal feature validation; surface profilometry for finish compliance
§ Cleanroom Manufacturing & Finishing Process
Titanium Vented Vacuum Screw is manufactured using 5-axis cnc contouring, electropolishing, ultrasonic clean, vision inspection. Each operation is performed by certified machinists with real-time process monitoring and dimensional verification at critical stages. Heat code traceability is maintained throughout all production steps.
Commercial Logistics & Procurement Framework
Pricing and lead times for Titanium Vented Vacuum Screw are batch-dependent. Contact our supply chain team for volume-based tiered pricing.
Regulatory & Quality Assurance Ledger
Verifiable certifications for Titanium Vented Vacuum Screw
Material Test Certificate (MTC)
EN 10204 3.1
Environmental Compliance
REACH (EC No 1907/2006)
Restricted Substances
RoHS 3 Directive (2015/863/EU)
Dimensional Tolerances
ISO 2768-m
Standard: MIL-STD-810H
MIL-STD-810H
Standard: ASTM B117
ASTM B117
Systems Interconnectivity & Topology
Cross-functional integration matrix for Tier-1 supply chains and assembly orchestration.
- ▸ Platform Interface Plate
- ▸ System Integration Frame
Titanium Vented Vacuum Screw
Material: Grade 5 Ti-6Al-4V
SKU: TI-SEM-CHA-VENTED
Industry: Semiconductor / System: UHV Sealing Rings & Chamber Compression Hardware
- ▸ Retention Clip Assembly
- ▸ Compression Spring Set
- ▸ Installation Tool
Request Enterprise Pricing
Fill out the form below and our team will respond within 24 hours with a tailored quotation for Titanium Vented Vacuum Screw (SKU: TI-SEM-CHA-VENTED).
Related Knowledge
Material
Grade 5 Ti-6Al-4V
Capability
Electropolishing + Class 100 ultrasonic cleaning
Surface Treatment
Capability
Electropolishing of all vacuum-facing surfaces
Surface Treatment
Capability
Electropolishing of all wetted surfaces
Surface Treatment
System
UHV Sealing Rings & Chamber Compression Hardware
Need titanium vented vacuum screw for your semiconductor process tool? Send your specifications — our cleanroom manufacturing team responds within 24 hours.
Request UHV Manufacturing Quote for Titanium Vented Vacuum ScrewOne Metal. One Focus. Infinite Precision.
Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze CNC Ti is the dedicated titanium manufacturing center of Baoji Boze Metal Products Co., Ltd.